Several experiments have been done in order to check the potential source of dust in the ThomX cavity. For each step, we look at a clean surface, put the cavity under vacuum, go back at ambient pressure and check back the "clean surface".

1st: Primary pump on
2nd: Primary pump + Turbo pump on
3rd: Primary pump + Turbo pump + Ion pump on
4th: Primary pump + Turbo pump + Ion pump on + 10 "open/close" displacement of the pneumatic valve
5th: Primary pump + Turbo pump + Ion pump on + 1 full range displacement of P1 z motor
6th : Primary pump + Turbo pump + Ion pump on + RGA

None of these experiences have shown good correlation with dust generation. 
The RGA has shown reasonable values.
Conclusion is that dust was already in the cavity and was only displaced by all combined motors, pneumatic valves, cavity opening and closing movements.